JPS5636227B2 - - Google Patents
Info
- Publication number
- JPS5636227B2 JPS5636227B2 JP11578973A JP11578973A JPS5636227B2 JP S5636227 B2 JPS5636227 B2 JP S5636227B2 JP 11578973 A JP11578973 A JP 11578973A JP 11578973 A JP11578973 A JP 11578973A JP S5636227 B2 JPS5636227 B2 JP S5636227B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11578973A JPS5636227B2 (en]) | 1973-10-17 | 1973-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11578973A JPS5636227B2 (en]) | 1973-10-17 | 1973-10-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5066449A JPS5066449A (en]) | 1975-06-04 |
| JPS5636227B2 true JPS5636227B2 (en]) | 1981-08-22 |
Family
ID=14671095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11578973A Expired JPS5636227B2 (en]) | 1973-10-17 | 1973-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5636227B2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02112119U (en]) * | 1989-02-28 | 1990-09-07 | ||
| JP2023075223A (ja) * | 2021-08-04 | 2023-05-30 | 株式会社エスケーエレクトロニクス | パターン修正方法 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57112018A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Correction of pattern |
| JP7489359B2 (ja) * | 2021-08-04 | 2024-05-23 | 株式会社エスケーエレクトロニクス | パターン修正方法 |
| CN115704993A (zh) * | 2021-08-04 | 2023-02-17 | 株式会社Sk电子 | 图案修正方法以及光掩模 |
-
1973
- 1973-10-17 JP JP11578973A patent/JPS5636227B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02112119U (en]) * | 1989-02-28 | 1990-09-07 | ||
| JP2023075223A (ja) * | 2021-08-04 | 2023-05-30 | 株式会社エスケーエレクトロニクス | パターン修正方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5066449A (en]) | 1975-06-04 |